Faraday Cage Reactive Ion Etching: Simulation and Experiments

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dc.contributor.authorLataweic, Pawelko
dc.contributor.authorSohn, Young-Ikko
dc.contributor.authorBurek, Michael Jko
dc.contributor.authorLoncar, Markoko
dc.date.accessioned2020-12-21T08:31:25Z-
dc.date.available2020-12-21T08:31:25Z-
dc.date.created2020-12-02-
dc.date.issued2016-06-
dc.identifier.citationInternational Conference on Electron, Ion and Photon Beam Technology and Nanofabrication 2016-
dc.identifier.urihttp://hdl.handle.net/10203/278840-
dc.languageEnglish-
dc.publisherEIPBN-
dc.titleFaraday Cage Reactive Ion Etching: Simulation and Experiments-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameInternational Conference on Electron, Ion and Photon Beam Technology and Nanofabrication 2016-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationWyndham Grand Hotel, Pittsburgh, PA-
dc.contributor.localauthorSohn, Young-Ik-
dc.contributor.nonIdAuthorLataweic, Pawel-
dc.contributor.nonIdAuthorBurek, Michael J-
dc.contributor.nonIdAuthorLoncar, Marko-
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EE-Conference Papers(학술회의논문)
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