DC Field | Value | Language |
---|---|---|
dc.contributor.author | Gao, Min | ko |
dc.contributor.author | Zhao, Zhi-Jun | ko |
dc.contributor.author | Kim, Hyeonggyun | ko |
dc.contributor.author | Jin, Mingliang | ko |
dc.contributor.author | Li, Panpan | ko |
dc.contributor.author | Kim, Taehwan | ko |
dc.contributor.author | Kang, Kyungnam | ko |
dc.contributor.author | Cho, Incheol | ko |
dc.contributor.author | Jeong, Jun-Ho | ko |
dc.contributor.author | Park, Inkyu | ko |
dc.date.accessioned | 2020-09-22T06:55:12Z | - |
dc.date.available | 2020-09-22T06:55:12Z | - |
dc.date.created | 2020-09-14 | - |
dc.date.created | 2020-09-14 | - |
dc.date.created | 2020-09-14 | - |
dc.date.issued | 2020-08 | - |
dc.identifier.citation | ACS APPLIED MATERIALS & INTERFACES, v.12, no.33, pp.37128 - 37136 | - |
dc.identifier.issn | 1944-8244 | - |
dc.identifier.uri | http://hdl.handle.net/10203/276387 | - |
dc.description.abstract | The high surface-to-volume ratio of nanostructured materials is the key factor for excellent performance when applied to chemical sensors. In order to achieve this by a facile and low-cost fabrication strategy, buffered oxide etchant (BOE) treatment of a silicon (Si)-based sensor was proposed. An n(+)-n(-)-n(+) Si nanofilm structure was treated with a BOE, and palladium nanoparticles (PdNPs) were coated on the n-type Si channel surface via short-time electron beam evaporation to enable a highly sensitive and selective sensing of hydrogen (H-2) gas. The BOE treatment effect on lightly doped n-type Si was investigated, and the surface morphology of the etched Si was analyzed. Furthermore, the H-2 sensing characterization of PdNP-decorated Si devices with various BOE treatment times was systematically evaluated at room temperature. The results revealed that the surface of n-type Si is roughened by BOE treatment, which can further enhance the H-2-sensing performance of Pd-decorated Si. The elaborate study on the BOE-post-treated Si H-2 sensor showed that the performance enhancement was stable. The BOE treatment strategy was also applied to the nanopatterned Si sensors, which induced a clear performance enhancement for the H-2 sensing. | - |
dc.language | English | - |
dc.publisher | AMER CHEMICAL SOC | - |
dc.title | Buffered Oxide Etchant Post-Treatment of a Silicon Nanofilm for Low-Cost and Performance-Enhanced Chemical Sensors | - |
dc.type | Article | - |
dc.identifier.wosid | 000563074900030 | - |
dc.identifier.scopusid | 2-s2.0-85089714578 | - |
dc.type.rims | ART | - |
dc.citation.volume | 12 | - |
dc.citation.issue | 33 | - |
dc.citation.beginningpage | 37128 | - |
dc.citation.endingpage | 37136 | - |
dc.citation.publicationname | ACS APPLIED MATERIALS & INTERFACES | - |
dc.identifier.doi | 10.1021/acsami.0c08977 | - |
dc.contributor.localauthor | Park, Inkyu | - |
dc.contributor.nonIdAuthor | Zhao, Zhi-Jun | - |
dc.contributor.nonIdAuthor | Kim, Hyeonggyun | - |
dc.contributor.nonIdAuthor | Jin, Mingliang | - |
dc.contributor.nonIdAuthor | Li, Panpan | - |
dc.contributor.nonIdAuthor | Kim, Taehwan | - |
dc.contributor.nonIdAuthor | Jeong, Jun-Ho | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | thin film sensor | - |
dc.subject.keywordAuthor | hydrogen sensor | - |
dc.subject.keywordAuthor | buffered oxide etchant | - |
dc.subject.keywordAuthor | palladium nanoparticles | - |
dc.subject.keywordAuthor | surface roughness | - |
dc.subject.keywordPlus | FIELD-EFFECT TRANSISTOR | - |
dc.subject.keywordPlus | SENSING PROPERTIES | - |
dc.subject.keywordPlus | NANOWIRE | - |
dc.subject.keywordPlus | NANOSENSORS | - |
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