Multi-reference correlated double sampling detection method and microbolometer using the same

Abstract

Disclosed is a multi-reference correlated double sampling detection method including generating, by a plurality of unit reference cells, reference signals, receiving, by a plurality of unit active cells having absorbed an infrared signal, sensing signals, and detecting a pure infrared signal on a basis of the sensing signals and active cell values processed using the reference signals, wherein the unit reference cells do not react to the infrared signal and are configured of blind cells having identical electrical and thermal characteristics to the unit active cells. Accordingly, a self-heating effect of an active cell may be accurately cancelled out, the method is robust to common noise such as power supply noise, and fixed pattern noise occurring in a sensing circuit and including incoherence between skimming cells may be removed. Furthermore, the method may improve efficiency and greatly reduce complexity of analog and digital correction, and remove a thermo-electro cooler and shutter.