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College of Engineering(공과대학)Dept. of Nuclear and Quantum Engineering(원자력및양자공학과)NE-Conference Papers(학술회의논문)

Preliminary Result of Tomographic Diagnostics for Plasma Spatial Uniformity of 8G Plasma Etching Device

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dc.contributor.authorChoe, Wonhoko
dc.contributor.authorPark, Sanghooko
dc.contributor.authorJang, Juhyeokko
dc.contributor.authorHong, Sung Jaeko
dc.contributor.authorKoo, Byung Heeko
dc.date.accessioned2020-06-29T08:22:15Z-
dc.date.available2020-06-29T08:22:15Z-
dc.date.created2020-06-15-
dc.date.created2020-06-15-
dc.date.issued2015-09-22-
dc.identifier.citation10th Asian-European International Conference on Plasma Surface Engineering (AEPSE)-
dc.identifier.urihttp://hdl.handle.net/10203/275035-
dc.publisherAsian Joint Committee for Applied Plasma Science and Engineering-
dc.titlePreliminary Result of Tomographic Diagnostics for Plasma Spatial Uniformity of 8G Plasma Etching Device-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname10th Asian-European International Conference on Plasma Surface Engineering (AEPSE)-
dc.identifier.conferencecountryKO-
dc.identifier.conferencelocationJeju-
dc.contributor.localauthorChoe, Wonho-
dc.contributor.nonIdAuthorPark, Sanghoo-
dc.contributor.nonIdAuthorJang, Juhyeok-
dc.contributor.nonIdAuthorHong, Sung Jae-
dc.contributor.nonIdAuthorKoo, Byung Hee-
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NE-Conference Papers(학술회의논문)
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