Variable Structured Illumination Using Lissajous Scanning MEMS Mirror

Cited 1 time in webofscience Cited 0 time in scopus
  • Hit : 26
  • Download : 0
We report the realization of variable structured illumination using a controlled Lissajous scanning MEMS mirror. The MEMS mirror was electrostatically operated at pseudo-resonant frequencies within the bandwidth. The pattern density was controlled by selecting the scanning frequencies with the greatest common divisor (GCD) greater than 1. The constant pattern was achieved by modulating a laser beam at the least common multiple (LCM) of the scanning frequencies. Variable structured illumination was successfully achieved by controlling both the GCD of scanning frequencies as well as the phase of operating signals. This method can provide a new direction for 3D MEMS imaging applications.
Publisher
IEEE Computer Society
Issue Date
2018-08
Language
English
Citation

23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018, pp.153 - 154

ISSN
2160-5033
DOI
10.1109/OMN.2018.8454544
URI
http://hdl.handle.net/10203/274739
Appears in Collection
BiS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 1 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0