필 팩터가 향상된 마이크로 볼로미터 및 마이크로 볼로미터의 제조 방법MICRO BOLOMETERS WITH IMPROVED FILL FACTOR AND METHOD OF MANUFACTURING MICRO BOLOMETERS
- Assignee
- 한국과학기술원
- Country
- KO (South Korea)
- Application Date
- 2016-04-27
- Application Number
- 10-2016-0051784
- Registration Date
- 2017-04-25
- Registration Number
- 10-1731798-0000
- Appears in Collection
- EE-Patent(특허)
- Files in This Item
- There are no files associated with this item.
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