Accurate thickness measurement using a single terahertz pulse obtained in ambient atmosphere

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Terahertz (THz) radiation suffers severe signal loss due to the high absorptivity of water vapor abundant in normal atmosphere, greatly limiting its potential in noninvasive material characterization. We propose a novel THz signal processing method that enables effective extraction of hidden sample information leading to accurate thickness determination. The thicknesses of multiple silicon wafers are measured using only a single THz pulse obtained in ambient atmosphere without any prior sample information. The results verify our proposed approach to achieve accurate and precise characterization of materials in a realistic environment.
Publisher
ELSEVIER
Issue Date
2020-05
Language
English
Article Type
Article
Citation

OPTICS COMMUNICATIONS, v.462

ISSN
0030-4018
DOI
10.1016/j.optcom.2020.125276
URI
http://hdl.handle.net/10203/273855
Appears in Collection
ME-Journal Papers(저널논문)
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