Precision Surface Profile Measurements by Comb-based Multi-wavelength Interferometry,
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Choi, Minah | ko |
| dc.contributor.author | Hyun, Sang-Won | ko |
| dc.contributor.author | Chun, Byung Jae | ko |
| dc.contributor.author | Kim, Seungman | ko |
| dc.contributor.author | Kim, Seung-Woo | ko |
| dc.contributor.author | KIM, Young-Jin | ko |
| dc.date.accessioned | 2020-03-19T06:20:12Z | - |
| dc.date.available | 2020-03-19T06:20:12Z | - |
| dc.date.created | 2019-12-30 | - |
| dc.date.created | 2019-12-30 | - |
| dc.date.created | 2019-12-30 | - |
| dc.date.issued | 2013-07 | - |
| dc.identifier.citation | 2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR) | - |
| dc.identifier.uri | http://hdl.handle.net/10203/273201 | - |
| dc.description.abstract | Precision measurement of large-stepped surface profiles is demonstrated using the frequency comb of a femtosecond pulse laser. Four optical wavelengths are selected out of the frequency comb to realize the principle of multi-wavelength interferometry with traceability to the Rb atomic clock of time/frequency standard. A large step-height of ~70 μm is exemplarily measured with nanometre precision with the maximum measurable height being extended to tens of mm. | - |
| dc.language | English | - |
| dc.publisher | The Optical Society (OSA) | - |
| dc.title | Precision Surface Profile Measurements by Comb-based Multi-wavelength Interferometry, | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000334176100129 | - |
| dc.identifier.scopusid | 2-s2.0-84885444312 | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR) | - |
| dc.identifier.conferencecountry | JA | - |
| dc.identifier.conferencelocation | Kyoto | - |
| dc.identifier.doi | 10.1109/CLEOPR.2013.6600040 | - |
| dc.contributor.localauthor | Kim, Seung-Woo | - |
| dc.contributor.localauthor | KIM, Young-Jin | - |
| dc.contributor.nonIdAuthor | Choi, Minah | - |
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