Femtosecond pulses for 3-D surface measurement of microelectronic step-structures
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KIM, Young-Jin | ko |
| dc.contributor.author | Joo, Woo-Deok | ko |
| dc.contributor.author | Park, Jiyong | ko |
| dc.contributor.author | Kim, Seungman | ko |
| dc.contributor.author | Kim, Seung-Woo | ko |
| dc.date.accessioned | 2020-03-19T05:25:32Z | - |
| dc.date.available | 2020-03-19T05:25:32Z | - |
| dc.date.created | 2019-12-30 | - |
| dc.date.created | 2019-12-30 | - |
| dc.date.created | 2019-12-30 | - |
| dc.date.issued | 2014-06 | - |
| dc.identifier.citation | 2014 Conference on Lasers and Electro-Optics, CLEO 2014 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/273187 | - |
| dc.description.abstract | We present a fast and precise 3-D measurement of microelectronic step-structures over a wide field-of-view by utilizing high spatial coherence, low temporal coherence and repetition rate tunablility of femtosecond laser pulses. | - |
| dc.language | English | - |
| dc.publisher | The Optical Society (OSA) | - |
| dc.title | Femtosecond pulses for 3-D surface measurement of microelectronic step-structures | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000369908600136 | - |
| dc.identifier.scopusid | 2-s2.0-84944699487 | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2014 Conference on Lasers and Electro-Optics, CLEO 2014 | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | San Jose, CA | - |
| dc.contributor.localauthor | KIM, Young-Jin | - |
| dc.contributor.localauthor | Kim, Seung-Woo | - |
| dc.contributor.nonIdAuthor | Joo, Woo-Deok | - |
| dc.contributor.nonIdAuthor | Park, Jiyong | - |
| dc.contributor.nonIdAuthor | Kim, Seungman | - |
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