Precision Measurement of High-stepped Structures using Extended Repetition Rate Scan Range of Femtosecond Laser Pulses
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박지용 | ko |
| dc.contributor.author | Kim, S | ko |
| dc.contributor.author | Kim, B | ko |
| dc.contributor.author | 김영진 | ko |
| dc.contributor.author | 김승우 | ko |
| dc.date.accessioned | 2020-03-19T05:24:47Z | - |
| dc.date.available | 2020-03-19T05:24:47Z | - |
| dc.date.created | 2019-12-27 | - |
| dc.date.issued | 2014-10 | - |
| dc.identifier.citation | Korean Society of Precision Engineering Autumn Conference | - |
| dc.identifier.uri | http://hdl.handle.net/10203/273173 | - |
| dc.language | Korean | - |
| dc.publisher | Korean Society of Precision Engineering | - |
| dc.title | Precision Measurement of High-stepped Structures using Extended Repetition Rate Scan Range of Femtosecond Laser Pulses | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Korean Society of Precision Engineering Autumn Conference | - |
| dc.identifier.conferencecountry | KO | - |
| dc.contributor.localauthor | 김승우 | - |
| dc.contributor.nonIdAuthor | Kim, S | - |
| dc.contributor.nonIdAuthor | Kim, B | - |
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