Directed Self-assembly of Sub-10 nm Perpendicular Lamellar Pattern by Fluorine Copolymerized Block Copolymer

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Publisher
The Korean Institute of Metals and Materials
Issue Date
2018-11-14
Language
English
Citation

International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE 2018)

URI
http://hdl.handle.net/10203/272506
Appears in Collection
MS-Conference Papers(학술회의논문)
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