Maximizing Percolation Effect Using Sub-100 nm Nano-Valley for High Performance Wearable Transparent Pressure Sensor

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This paper reports a high-sensitivity wearable transparent pressure sensor by maximizing the percolation effect using a sub-100 nm nano-valley. The secret to achieving high sensitivity is to make the nano-valley as narrow as possible to maximize the percolation effect (stress concentration effect). The narrow nano-valley pressure sensor showed a remarkable 400% enhancement in sensitivity compared to a sensor with no nano-valley while maintaining a high transmittance of 83%. This sensitivity value is higher than those of the previous wearable transparent pressure sensors. The fabricated sensor also showed high durability with low variation of 1.2% in repeated pressing of up to 100,000 times under 100 kPa pressure.
Publisher
Institute of Electrical and Electronics Engineers Inc.
Issue Date
2019-01-29
Language
English
Citation

32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, pp.91 - 94

DOI
10.1109/MEMSYS.2019.8870688
URI
http://hdl.handle.net/10203/269534
Appears in Collection
EE-Conference Papers(학술회의논문)
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