DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yun, Jeonghoon | ko |
dc.contributor.author | Ahn, Jae-Hyuk | ko |
dc.contributor.author | Moon, Dong-Il | ko |
dc.contributor.author | Choi, Yang-Kyu | ko |
dc.contributor.author | Park, Inkyu | ko |
dc.date.accessioned | 2019-12-13T01:25:33Z | - |
dc.date.available | 2019-12-13T01:25:33Z | - |
dc.date.created | 2019-12-09 | - |
dc.date.created | 2019-12-09 | - |
dc.date.issued | 2019-11 | - |
dc.identifier.citation | ACS APPLIED MATERIALS & INTERFACES, v.11, no.45, pp.42349 - 42357 | - |
dc.identifier.issn | 1944-8244 | - |
dc.identifier.uri | http://hdl.handle.net/10203/268817 | - |
dc.description.abstract | We developed self-heated, suspended, and palladium-decorated silicon nanowires (Pd-SiNWs) for high-performance hydrogen (H-2) gas sensing with low power consumption and high stability against diverse environmental noises. To prepare the Pd-SiNWs, SiNWs were fabricated by conventional complementary metal-oxide-semiconductor (CMOS) processes, and Pd nanoparticles were coated on the SiNWs by a physical vapor deposition method. Suspended Pd-SiNWs were simply obtained by etching buried oxide layer and Pd deposition. Joule heating of Pd-SiNW (<1 mW) enables the detection of H-2 gas with a faster response and without the reduction of sensitivity unlike other Pd-based H-2 gas sensors. We proposed a H-2 sensing model using oxygen adsorption on the Pd nanoparticle-coated silicon oxide surface to understand the H-2 response of Joule-heated Pd-SiNWs. A suspended Pd-SiNW showed a similar transient sensing response with around four times lower Joule heating power (147 mu W) than the substrate-bound Pd-SiNW (613 mu W). The effect of interfering gas on the Pd-SiNW was investigated, and it was found that the Joule heating of Pd-SiNW helps to maintain the H-2 sensing performance in humid or carbon monoxide environments. | - |
dc.language | English | - |
dc.publisher | AMER CHEMICAL SOC | - |
dc.title | Joule-Heated and Suspended Silicon Nanowire Based Sensor for Low-Power and Stable Hydrogen Detection | - |
dc.type | Article | - |
dc.identifier.wosid | 000497263600055 | - |
dc.identifier.scopusid | 2-s2.0-85074767554 | - |
dc.type.rims | ART | - |
dc.citation.volume | 11 | - |
dc.citation.issue | 45 | - |
dc.citation.beginningpage | 42349 | - |
dc.citation.endingpage | 42357 | - |
dc.citation.publicationname | ACS APPLIED MATERIALS & INTERFACES | - |
dc.identifier.doi | 10.1021/acsami.9b15111 | - |
dc.contributor.localauthor | Choi, Yang-Kyu | - |
dc.contributor.localauthor | Park, Inkyu | - |
dc.contributor.nonIdAuthor | Ahn, Jae-Hyuk | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | hydrogen gas sensor | - |
dc.subject.keywordAuthor | silicon nanowire | - |
dc.subject.keywordAuthor | Joule heating | - |
dc.subject.keywordAuthor | palladium | - |
dc.subject.keywordAuthor | low-power sensor | - |
dc.subject.keywordAuthor | isotherm | - |
dc.subject.keywordPlus | SURFACE MODIFICATION | - |
dc.subject.keywordPlus | GAS SENSORS | - |
dc.subject.keywordPlus | METAL | - |
dc.subject.keywordPlus | PERFORMANCE | - |
dc.subject.keywordPlus | INTERNET | - |
dc.subject.keywordPlus | HEALTH | - |
dc.subject.keywordPlus | NANOMATERIALS | - |
dc.subject.keywordPlus | INTEGRATION | - |
dc.subject.keywordPlus | DESIGN | - |
dc.subject.keywordPlus | THINGS | - |
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