Joule-Heated and Suspended Silicon Nanowire Based Sensor for Low-Power and Stable Hydrogen Detection

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dc.contributor.authorYun, Jeonghoonko
dc.contributor.authorAhn, Jae-Hyukko
dc.contributor.authorMoon, Dong-Ilko
dc.contributor.authorChoi, Yang-Kyuko
dc.contributor.authorPark, Inkyuko
dc.date.accessioned2019-12-13T01:25:33Z-
dc.date.available2019-12-13T01:25:33Z-
dc.date.created2019-12-09-
dc.date.created2019-12-09-
dc.date.issued2019-11-
dc.identifier.citationACS APPLIED MATERIALS & INTERFACES, v.11, no.45, pp.42349 - 42357-
dc.identifier.issn1944-8244-
dc.identifier.urihttp://hdl.handle.net/10203/268817-
dc.description.abstractWe developed self-heated, suspended, and palladium-decorated silicon nanowires (Pd-SiNWs) for high-performance hydrogen (H-2) gas sensing with low power consumption and high stability against diverse environmental noises. To prepare the Pd-SiNWs, SiNWs were fabricated by conventional complementary metal-oxide-semiconductor (CMOS) processes, and Pd nanoparticles were coated on the SiNWs by a physical vapor deposition method. Suspended Pd-SiNWs were simply obtained by etching buried oxide layer and Pd deposition. Joule heating of Pd-SiNW (<1 mW) enables the detection of H-2 gas with a faster response and without the reduction of sensitivity unlike other Pd-based H-2 gas sensors. We proposed a H-2 sensing model using oxygen adsorption on the Pd nanoparticle-coated silicon oxide surface to understand the H-2 response of Joule-heated Pd-SiNWs. A suspended Pd-SiNW showed a similar transient sensing response with around four times lower Joule heating power (147 mu W) than the substrate-bound Pd-SiNW (613 mu W). The effect of interfering gas on the Pd-SiNW was investigated, and it was found that the Joule heating of Pd-SiNW helps to maintain the H-2 sensing performance in humid or carbon monoxide environments.-
dc.languageEnglish-
dc.publisherAMER CHEMICAL SOC-
dc.titleJoule-Heated and Suspended Silicon Nanowire Based Sensor for Low-Power and Stable Hydrogen Detection-
dc.typeArticle-
dc.identifier.wosid000497263600055-
dc.identifier.scopusid2-s2.0-85074767554-
dc.type.rimsART-
dc.citation.volume11-
dc.citation.issue45-
dc.citation.beginningpage42349-
dc.citation.endingpage42357-
dc.citation.publicationnameACS APPLIED MATERIALS & INTERFACES-
dc.identifier.doi10.1021/acsami.9b15111-
dc.contributor.localauthorChoi, Yang-Kyu-
dc.contributor.localauthorPark, Inkyu-
dc.contributor.nonIdAuthorAhn, Jae-Hyuk-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorhydrogen gas sensor-
dc.subject.keywordAuthorsilicon nanowire-
dc.subject.keywordAuthorJoule heating-
dc.subject.keywordAuthorpalladium-
dc.subject.keywordAuthorlow-power sensor-
dc.subject.keywordAuthorisotherm-
dc.subject.keywordPlusSURFACE MODIFICATION-
dc.subject.keywordPlusGAS SENSORS-
dc.subject.keywordPlusMETAL-
dc.subject.keywordPlusPERFORMANCE-
dc.subject.keywordPlusINTERNET-
dc.subject.keywordPlusHEALTH-
dc.subject.keywordPlusNANOMATERIALS-
dc.subject.keywordPlusINTEGRATION-
dc.subject.keywordPlusDESIGN-
dc.subject.keywordPlusTHINGS-
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