DC Field | Value | Language |
---|---|---|
dc.contributor.author | Im, Kiju | ko |
dc.contributor.author | Cho, Won-Ju | ko |
dc.contributor.author | Ahn, Chang-Geun | ko |
dc.contributor.author | Yang, Jong-Heon | ko |
dc.contributor.author | Oh, Jihun | ko |
dc.contributor.author | Lee, Seongjae | ko |
dc.contributor.author | Hwang, Hyunsang | ko |
dc.date.accessioned | 2019-11-07T01:20:20Z | - |
dc.date.available | 2019-11-07T01:20:20Z | - |
dc.date.created | 2019-11-05 | - |
dc.date.issued | 2004-05 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.43, no.5A, pp.2438 - 2441 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://hdl.handle.net/10203/268221 | - |
dc.description.abstract | This paper presents the electrical characteristics of trigate silicon-on-insulator (SOI) n-type metal-oxide-silicon field-effect transistor (n-MOSFET) devices with a gate length of 50 nm, a channel width of 100 nm, and a channel thickness of 30 nm. The source and drain of these trigate SOI n-MOSFETs were formed by ion-shower doping at 250°C. In particular, activation annealing after ion-shower doping was excluded in order to improve the lateral steepness of the source/drain junction. Without any additional thermal processes, a low sheet resistance (Rs) of 1.2 kΩ/□ was obtained by ion-shower doping, and trigate MOSFETs showed satisfactory electrical characteristics. Since the short-channel effect was suppressed and the ratio of maximum drain current to minimum drain current (I max/Imin) as ∼105, it is thought that the ion-shower doping process is effective for fabricating short-channel trigate SOI MOSFET devices. | - |
dc.language | English | - |
dc.publisher | JAPAN SOC APPLIED PHYSICS | - |
dc.title | Fabrication of 50 nm trigate silicon on insulator metal-oxide-silicon field-effect transistor without source/drain activation annealing | - |
dc.type | Article | - |
dc.identifier.wosid | 000221703600009 | - |
dc.identifier.scopusid | 2-s2.0-3142731479 | - |
dc.type.rims | ART | - |
dc.citation.volume | 43 | - |
dc.citation.issue | 5A | - |
dc.citation.beginningpage | 2438 | - |
dc.citation.endingpage | 2441 | - |
dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | - |
dc.identifier.doi | 10.1143/JJAP.43.2438 | - |
dc.contributor.localauthor | Oh, Jihun | - |
dc.contributor.nonIdAuthor | Im, Kiju | - |
dc.contributor.nonIdAuthor | Cho, Won-Ju | - |
dc.contributor.nonIdAuthor | Ahn, Chang-Geun | - |
dc.contributor.nonIdAuthor | Yang, Jong-Heon | - |
dc.contributor.nonIdAuthor | Lee, Seongjae | - |
dc.contributor.nonIdAuthor | Hwang, Hyunsang | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | SOI | - |
dc.subject.keywordAuthor | MOSFET | - |
dc.subject.keywordAuthor | CMOS | - |
dc.subject.keywordAuthor | trigate | - |
dc.subject.keywordAuthor | Coulomb blockade | - |
dc.subject.keywordPlus | SCALING THEORY | - |
dc.subject.keywordPlus | MOSFET | - |
dc.subject.keywordPlus | SOI | - |
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