Block copolymer self-assembly on 3D substrate with Initiated chemical vapor depositioniCVD 공정을 이용한 3차원 기판 상에서의 블록공중합체 자기조립에 관한 연구

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Functional devices such as flexible devices, wearable devices, bioinspired devices, and etc. are attracting attention as future technologies. These functional devices are fabricated on a complex 3D substrates. Therefore, in order to improve the performance of the functional device, a nanopatterning technique on a 3D substrate is essential. In this study, nanopatterns were formed on a 3D substrate by combining block copolymer self-assembly and iCVD process. The block copolymer has a disadvantage in that the polymer chains reflow during the thermal treatment and pattern is not formed in the upper part of the substrate. On the other hand, the iCVD process allows the conformal deposition of a polymer with a high degree of crosslinking to the desired thickness. pDVB polymer was deposited on the block copolymer deposited 3D substrate through the iCVD process. The pDVB layer has a high degree of crosslinking so that the pDVB layer does not flow down during the thermal annealing process and maintains its morphology. The pDVB layer acts as a supporting layer so that the block copolymer does not reflow during the thermal annealing process and the self-assembly pattern of block copolymer on a 3D substrate can be successfully formed. Furthermore, we successfully formed a block copolymer self-assembly pattern on the backside of a very rough and non-periodic Si substrate and on the surface of graphene fibers.
Advisors
Kim, Sang Oukresearcher김상욱researcher
Description
한국과학기술원 :신소재공학과,
Publisher
한국과학기술원
Issue Date
2018
Identifier
325007
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 신소재공학과, 2018.8,[iv, 45 p. :]

Keywords

block copolymer▼aself-assembly▼a3D substrate▼areflow▼aiCVD▼acrosslinked polymer▼agraphene fiber; 블록공중합체▼a자기조립▼a3차원 기판▼a흘러내림▼aiCVD▼a가교된 고분자▼a그래핀 섬유

URI
http://hdl.handle.net/10203/266425
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=828686&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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