Proposal, verification, and analysis of magnetic field shielding effectiveness measurement (MSEM) methodology for vertical and lateral magnetic fields

Abstract

Semiconductor package technology is increasingly demanding high density, and EMI problems between chip and chip are getting worse. In particular, various shielding materials and technologies are applied to solve the magnetic field noise coupling occurring between semiconductor chips. In the case of magnetic field shielding, the principle of shielding changes depending on the material and the direction of the magnetic field formed on the shielding film. However, the directionality of the magnetic field was not considered in the conventional shielding effectiveness measurement methods. In this paper, we propose a magnetic field shielding effectiveness measurement methodology for vertical and lateral magnetic fields and compare the proposed method with 3D EM simulation and conventional measurement methods. In addition, we verify the necessity of the shielding effectiveness measurement methodology according to the direction of the magnetic field by comparing the shielding effectiveness measurement between the metal material and the ferromagnetic material.