DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Sohn, Hoon | - |
dc.contributor.advisor | 손훈 | - |
dc.contributor.author | Jang, Jinho | - |
dc.date.accessioned | 2019-08-28T02:38:36Z | - |
dc.date.available | 2019-08-28T02:38:36Z | - |
dc.date.issued | 2019 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=842984&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/265593 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 건설및환경공학과, 2019.2,[ii, 33 p. :] | - |
dc.description.abstract | This thesis presents the development of a crack detection method in silicon wafer using high repetition rate pulse laser. Conventional non-contact laser ultrasonic inspection method used pulse laser, which can only generate wideband ultrasonic waves in frequency domain but not narrowband ones. In this study, Narrowband ultrasonic signals are generated in frequency domain through high repetition rate pulse laser, and it is used to detect cracks in silicon wafer. When we excite low frequency (LF) and high frequency (HF) inputs to a silicon wafer, the presence of nonlinear sources, such as cracks, creates nonlinear ultrasonic modulation components at spectral sideband. Two narrowband ultrasonic waves with two distinctive central frequencies are generated by high repetition rate pulse laser to investigate the crack induced nonlinear ultrasonic modulation, and they are used to indicate the existence of the crack. Moreover, a probability of detection (POD) is established for the proposed crack detection technique. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | nonlinear ultrasonic modulation▼alaser ultrasonic▼acrack detection | - |
dc.subject | 비선형 초음파 모듈레이션▼a레이저 초음파▼a균열 검출 | - |
dc.title | Development of a noncontact crack detection technique using pulse laser with high repetition rate | - |
dc.title.alternative | 고반복률 펄스 레이저를 이용한 비접촉식 균열 검출 기술 개발 | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :건설및환경공학과, | - |
dc.contributor.alternativeauthor | 장진호 | - |
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