학위논문(박사) - 한국과학기술원 : 전기및전자공학부, 2018.2,[iii, 97 p. :]
MEMS Relay▼aMEMS Switch▼aReliability▼aActuation Voltage▼aResonant Frequency; 멤스 릴레이▼a멤스 스위치▼a신뢰성▼a동작전압▼a고주파
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