Ag/Au Alloyed Nanoislands for Wafer-Level Plasmonic Color Filter Arrays

Abstract

Alloyed metals in nanoscale exhibit some intriguing features that are absent in mono-metallic nanostructures. Here we report silver and gold alloyed nanoislands with high tunability of localized surface plasmon resonance (LSPR) wavelength in the visible range for wafer-level plasmonic color filter arrays. The nanofabrication includes two simple steps of concurrent thermal evaporation of Ag and Au grains and solid-state dewetting of the as-deposited nanocomposite thin film. The alloy ratio during the evaporation precisely tunes the LSPR wavelengths within 415-609 nm spectrum range. The elemental composition map reveals that alloyed nanoislands are completely miscible while preserving uniform size, regardless of the alloy ratio. Besides, the multiple lift-off processes and thermal dewetting of Ag/Au nanocomposite thin films successfully demonstrate the wafer-level nanofabrication of plasmonic color filter mosaic. Each plasmonic color pixel comprises different alloy ratio and efficiently transmits colors ranging from cyan, yellow, and magenta. The transmission spectra transposed onto a CIE 1931 color map show comparable color diversity to the plasmonic color filters fabricated by conventional e-beam lithographic techniques. This novel method provides a new direction for large-scale and visible plasmonic color filter arrays in advanced display or imaging applications.