DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 박승오 | - |
dc.contributor.advisor | Park, Seung-O | - |
dc.contributor.author | 배귀남 | - |
dc.contributor.author | Bae, Gwi-Nam | - |
dc.date.accessioned | 2011-12-12T06:58:58Z | - |
dc.date.available | 2011-12-12T06:58:58Z | - |
dc.date.issued | 1994 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68983&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/26195 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 항공우주공학과, 1994.2, [ xiii, 109 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.title | 반도체 웨이퍼상의 입자 침착속도의 측정 및 제어 | - |
dc.title.alternative | Measurement and control of particle deposition velocity on a semiconductor wafer surface | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 68983/325007 | - |
dc.description.department | 한국과학기술원 : 항공우주공학과, | - |
dc.identifier.uid | 000855171 | - |
dc.contributor.localauthor | 박승오 | - |
dc.contributor.localauthor | Park, Seung-O | - |
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