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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
실리콘의 이방성 식각 특성을 이용한 정전 구동형 초소형 거울의 개발 = Development of electrostatically-driven vertical micro mirrors using anisotropic silicon etchinglink

서경선; Seo, Kyoung-Sun; 윤성기; 조영호; Youn, Sung-Kie; Cho, Young-Ho, 한국과학기술원, 1996

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