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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
AFM scanner용 초정밀 XYZ 스테이지의 설계, 특성분석 및 제어에 관한 연구 = A precision XYZ-stage for AFM scanner design, analysis and controllink

심종엽; Shim, Jong-Youp; 권대갑; Gweon, Dae-Gab, 한국과학기술원, 1998

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