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| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| 반도체 웨이퍼상의 입자 침착속도의 측정 및 제어 = Measurement and control of particle deposition velocity on a semiconductor wafer surfacelink 배귀남; Bae, Gwi-Nam; 박승오researcher; Park, Seung-O, 한국과학기술원, 1994 |
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- 1 1994