Optimizing CMP for Ultra-Low-k Dielectrics
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Taek-Soo | ko |
| dc.contributor.author | Konno, T | ko |
| dc.contributor.author | Yamanaka, T | ko |
| dc.contributor.author | R.H. Dauskardt | ko |
| dc.date.accessioned | 2019-04-16T03:52:46Z | - |
| dc.date.available | 2019-04-16T03:52:46Z | - |
| dc.date.created | 2014-01-14 | - |
| dc.date.issued | 2008-01-01 | - |
| dc.identifier.citation | 13th International Chemical Mechanical Planarization Conference for ULSI Multilevel Interconnection | - |
| dc.identifier.uri | http://hdl.handle.net/10203/260387 | - |
| dc.language | English | - |
| dc.publisher | 13th International Chemical Mechanical Planarization Conference for ULSI Multilevel Interconnection | - |
| dc.title | Optimizing CMP for Ultra-Low-k Dielectrics | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 13th International Chemical Mechanical Planarization Conference for ULSI Multilevel Interconnection | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Fremont | - |
| dc.contributor.localauthor | Kim, Taek-Soo | - |
| dc.contributor.nonIdAuthor | Konno, T | - |
| dc.contributor.nonIdAuthor | Yamanaka, T | - |
| dc.contributor.nonIdAuthor | R.H. Dauskardt | - |
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