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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Tuning Depth Profiles of Low-k Dielectrics with UV Curing

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dc.contributor.authorKim, Taek-Sooko
dc.contributor.authorTsuji, Nko
dc.contributor.authorvan der Hilst, Jko
dc.contributor.authorMatsushita, Kko
dc.contributor.authorKobayashi, Nko
dc.contributor.authorChumakov, Dko
dc.contributor.authorGeisler, Hko
dc.contributor.authorZshech, Eko
dc.contributor.authorR.H. Dauskardtko
dc.date.accessioned2019-04-16T03:52:44Z-
dc.date.available2019-04-16T03:52:44Z-
dc.date.created2014-01-14-
dc.date.issued2008-01-01-
dc.identifier.citationAdvanced Metallization Conference-
dc.identifier.urihttp://hdl.handle.net/10203/260386-
dc.languageEnglish-
dc.publisherAdvanced Metallization Conference-
dc.titleTuning Depth Profiles of Low-k Dielectrics with UV Curing-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameAdvanced Metallization Conference-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationSan Diego-
dc.contributor.localauthorKim, Taek-Soo-
dc.contributor.nonIdAuthorTsuji, N-
dc.contributor.nonIdAuthorvan der Hilst, J-
dc.contributor.nonIdAuthorMatsushita, K-
dc.contributor.nonIdAuthorKobayashi, N-
dc.contributor.nonIdAuthorChumakov, D-
dc.contributor.nonIdAuthorGeisler, H-
dc.contributor.nonIdAuthorZshech, E-
dc.contributor.nonIdAuthorR.H. Dauskardt-
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ME-Conference Papers(학술회의논문)
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