Nanoporous SiCOH Dual Phase Films with Low Dielectric Constant, Excellent Thermal and Mechanical Properties
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정희태 | ko |
| dc.contributor.author | 박종민 | ko |
| dc.contributor.author | 공병선 | ko |
| dc.date.accessioned | 2019-04-16T00:50:18Z | - |
| dc.date.available | 2019-04-16T00:50:18Z | - |
| dc.date.created | 2013-06-25 | - |
| dc.date.issued | 2012-10-11 | - |
| dc.identifier.citation | 2012 추계학술대회 한국고분자학회 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/259427 | - |
| dc.language | Korean | - |
| dc.publisher | 한국고분자학회 | - |
| dc.title | Nanoporous SiCOH Dual Phase Films with Low Dielectric Constant, Excellent Thermal and Mechanical Properties | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2012 추계학술대회 한국고분자학회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.contributor.localauthor | 정희태 | - |
| dc.contributor.nonIdAuthor | 박종민 | - |
| dc.contributor.nonIdAuthor | 공병선 | - |
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