액정을 이용한 리소그래피

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dc.contributor.author윤동기ko
dc.contributor.authorH. Kimko
dc.contributor.authorS. H. Leeko
dc.contributor.authorT.J Shinko
dc.contributor.authorE. Korblova, Dko
dc.contributor.authorM. Walbako
dc.contributor.authorN. A. Clarkko
dc.contributor.authorS. B. Leeko
dc.date.accessioned2019-04-15T22:31:53Z-
dc.date.available2019-04-15T22:31:53Z-
dc.date.created2014-01-10-
dc.date.issued2013-04-10-
dc.identifier.citation제 2회 차세대 리소그래피 학술대회-
dc.identifier.urihttp://hdl.handle.net/10203/258792-
dc.languageKorean-
dc.publisher한국광학회-
dc.title액정을 이용한 리소그래피-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname제 2회 차세대 리소그래피 학술대회-
dc.identifier.conferencecountryKO-
dc.identifier.conferencelocation제주 서귀포 KAL 호텔-
dc.contributor.localauthor윤동기-
dc.contributor.nonIdAuthorH. Kim-
dc.contributor.nonIdAuthorS. H. Lee-
dc.contributor.nonIdAuthorT.J Shin-
dc.contributor.nonIdAuthorE. Korblova, D-
dc.contributor.nonIdAuthorM. Walba-
dc.contributor.nonIdAuthorN. A. Clark-
dc.contributor.nonIdAuthorS. B. Lee-
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NT-Conference Papers(학술회의논문)
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