DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cho, Young-ho | ko |
dc.contributor.author | Park, Kyu-yeon | ko |
dc.contributor.author | Lee, Chong-won | ko |
dc.contributor.author | Song, Ci-moo | ko |
dc.date.accessioned | 2019-04-15T20:54:30Z | - |
dc.date.available | 2019-04-15T20:54:30Z | - |
dc.date.issued | 1998-05-19 | - |
dc.identifier.uri | http://hdl.handle.net/10203/258319 | - |
dc.description.abstract | A microgyroscope includes a substrate, a first sensor where a plurality of stripe-shaped anodes and cathodes are alternatively arrayed in parallel on the substrate, a driver arranged to be perpendicular to a stripe length direction of the first sensor on the substrate and where a plurality of stripe-shaped anodes and cathodes are alternatively arrayed in parallel, a vibratory structure having a plurality of first grooves of a stripe shape vertically spaced from a plane of the first sensor and the driver at a predetermined height and formed in a direction congruous with a stripe length direction of first sensor and a plurality of second grooves of a stripe shape formed in a direction congruous with a stripe length direction of the driver, a support portion formed on the substrate for maintaining the vibratory structure from the substrate at a predetermined height, and elastic members for elastically connecting the vibratory structure and the support portion. | - |
dc.title | Microgyroscope with vibratory structure having a multitude of grooves | - |
dc.type | Patent | - |
dc.type.rims | PAT | - |
dc.contributor.localauthor | Cho, Young-ho | - |
dc.contributor.localauthor | Lee, Chong-won | - |
dc.contributor.nonIdAuthor | Park, Kyu-yeon | - |
dc.contributor.nonIdAuthor | Song, Ci-moo | - |
dc.contributor.assignee | Samsung Electronics Co., Ltd.,KAIST | - |
dc.identifier.iprsType | 특허 | - |
dc.identifier.patentApplicationNumber | 08773989 | - |
dc.identifier.patentRegistrationNumber | 5753817 | - |
dc.date.application | 1996-12-26 | - |
dc.date.registration | 1998-05-19 | - |
dc.publisher.country | US | - |
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