레이저석판인쇄장치의이중비임발생기The double beam generator of the laser lithographing apparatus
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 시스템생성자 | ko |
| dc.contributor.author | 주홍 | ko |
| dc.contributor.author | 한기관 | ko |
| dc.contributor.author | 최상삼 | ko |
| dc.date.accessioned | 2019-04-15T19:53:40Z | - |
| dc.date.available | 2019-04-15T19:53:40Z | - |
| dc.date.issued | 1990-02-12 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/257864 | - |
| dc.description.abstract | 내용 없음 | - |
| dc.title | 레이저석판인쇄장치의이중비임발생기 | - |
| dc.title.alternative | The double beam generator of the laser lithographing apparatus | - |
| dc.type | Patent | - |
| dc.type.rims | PAT | - |
| dc.contributor.localauthor | 시스템생성자 | - |
| dc.contributor.nonIdAuthor | 주홍 | - |
| dc.contributor.nonIdAuthor | 한기관 | - |
| dc.contributor.nonIdAuthor | 최상삼 | - |
| dc.contributor.assignee | 한국과학기술연구원 | - |
| dc.identifier.iprsType | 특허 | - |
| dc.identifier.patentApplicationNumber | 10-1987-0009942 | - |
| dc.identifier.patentRegistrationNumber | 10-0031658-0000 | - |
| dc.date.application | 1987-09-09 | - |
| dc.date.registration | 1990-02-12 | - |
| dc.publisher.country | KO | - |
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