염화실란의 불균등화 반응에 대한 실란의 제조방법Redistribution catalyst and methods for its preparation and use to convert chlorosilicon hydrides to silane
- Assignee
- KAIST
- Country
- US (United States)
- Issue Date
- 1986-09-23
- Application Date
- 1985-05-14
- Application Number
- 06733883
- Registration Date
- 1986-09-23
- Registration Number
- 4613491
- Appears in Collection
- RIMS Patents
- Files in This Item
- There are no files associated with this item.
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