염화실란의불균등화반응에의한실란의제조방법The manufacturing method of the silane about the disproportionation reaction of the chlorosilane

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Assignee
한국과학기술연구원
Country
KO (South Korea)
Issue Date
1986-10-13
Application Date
1984-05-17
Application Number
10-1984-0002678
Registration Date
1986-10-13
Registration Number
10-0021863-0000
URI
http://hdl.handle.net/10203/257453
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RIMS Patents
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