Scanner for two-dimensional optical scanning, manufacturing method thereof, and medical imaging apparatus using the same

Abstract

Provided are a scanner for two-dimensional optical scanning capable of implementing two-dimensional driving by one input signal without an additional structure for modulating a resonance frequency using modulation of the resonance frequency through asymmetry of the scanner itself, and a manufacturing method thereof. In addition, there is provided a manufacturing method of a scanner for two-dimensional optical scanning capable of implementing compact packaging through a micro electro mechanical systems (MEMS) process to miniaturize the scanner, such that it may be used in a micro-miniature system such as an endoscope and capable of increasing precision of the scanner and manufacturing the scanner in various shapes and at a low cost. Further, there is provided a medical imaging apparatus using a scanner for two-dimensional optical scanning capable of providing a medical image having improved quality without crosstalk between axes through separation of resonance frequencies.