MEMS VARIABLE CAPACITORMEMS VARIABLE CAPACITOR
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yoon, Jun-Bo | ko |
| dc.contributor.author | HAN, Chang Hoon | ko |
| dc.contributor.author | CHOI, Dong Hoon | ko |
| dc.contributor.author | YANG, Hyun Ho | ko |
| dc.date.accessioned | 2019-04-15T15:00:12Z | - |
| dc.date.available | 2019-04-15T15:00:12Z | - |
| dc.date.issued | 2016-08-16 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/254690 | - |
| dc.description.abstract | Disclosed is a MEMS variable capacitor including: a first electrode; a second electrode spaced apart from the first electrode; a third electrode floating above the first electrode; and an actuator including a fourth electrode facing the second electrode, a connector connecting the third electrode and the fourth electrode, and a support supporting a portion of the connector, wherein the third electrode and the connector are integrally formed with each other, and wherein a capacitance is changed by applying a voltage to the second electrode and by adjusting a gap between the first electrode and the third electrode. | - |
| dc.title | MEMS VARIABLE CAPACITOR | - |
| dc.title.alternative | MEMS VARIABLE CAPACITOR | - |
| dc.type | Patent | - |
| dc.type.rims | PAT | - |
| dc.contributor.localauthor | Yoon, Jun-Bo | - |
| dc.contributor.nonIdAuthor | HAN, Chang Hoon | - |
| dc.contributor.nonIdAuthor | CHOI, Dong Hoon | - |
| dc.contributor.nonIdAuthor | YANG, Hyun Ho | - |
| dc.contributor.assignee | KAIST | - |
| dc.identifier.iprsType | 특허 | - |
| dc.identifier.patentApplicationNumber | 13926083 | - |
| dc.identifier.patentRegistrationNumber | 9418794 | - |
| dc.date.application | 2013-06-25 | - |
| dc.date.registration | 2016-08-16 | - |
| dc.publisher.country | US | - |
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