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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
그리드를 장착한 DC 마그네트론 스퍼터링 플라즈마의 특성 연구 = Plasma characteristics of DC magnetron sputtering source with gridslink

인정환; In, Jeong-Hwan; 장홍영; Chang, Hong-Young, 한국과학기술원, 2004

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