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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
질화막을 입히기 위한 펄스가 인가된 질소 플라즈마 파라미터 거동 = Plasma parameter characteristics in Pulsed N2 Inductively Coupled Plasma for plasma oxynitridationlink

윤주미; Yun, Ju-Mi; 장홍영; Chang, Hong-Young, 한국과학기술원, 2009

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