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Results 1-1 of 1 (Search time: 0.004 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
(The) photolithography simulation using the finite element method = 유한요소법을 이용한 Photolithography simulationlink

Hong, Hun-Soo; 홍헌수; Kim, Soo-Yong; 김수용, 한국과학기술원, 1997

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