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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Optical properties of Er-doped silicon rich silicon oxide(SRSO) films deposited by electron cyclotron resonance-plasma enhanced chemical vapor deposition(ECR-PECVD) = ECR PECVD 방법으로 증착한 Er 이 도핑된 SRSO 박막에서의 광학적 특성연구link Seo, Se-Young; 서세영; Shin, Jung-Hoon; 신중훈, 한국과학기술원, 1998 |