Improved Phase Unwrapping of Shift Interferometer Using Precision XY-scanner

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A phase shift interferometer with an improved phase unwrapping is presented. The nanometer resolution XY stage is integrated into the standard temporal phase shifting interferometer. The nanometer resolution XY stage is used to position specimen in subpixel of CCD detector, therefore CCD detectors sampling frequency is made high. This paper presents spatial sampling of CCD and two scanning algorithms, whose simulation and experiment results are also presented. The results show that the scanning algorithms make CCD detector's sampling frequency high, and phase unwrapping is improved also.
Publisher
SPIE
Issue Date
1999-06
Keywords

Phase Shift Interferometer; Phase Unwrapping; 2t Ambiguity; CCD

Citation

International Conference on Optical Engineering for Sensing and Nanotechnology

URI
http://hdl.handle.net/10203/25397
Appears in Collection
ME-Conference Papers(학술회의논문)
Files in This Item
[1999]Improved Phase Unwrapping of Shift Interferometer Using Precision XY-scanner.pdf(735.41 kB)Download

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