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Development of a helicon plasma source and study of the helicon plasma characteristics at very high radio frequency = 초단파를 이용한 헬리콘 플라즈마원의 개발 및 발생된 헬리콘 플라즈마의 특성연구link

Eom, Gyu-Sub; 엄규섭; Cho, Gyu-Sung; Choe, Won-Ho; et al, 한국과학기술원, 2001

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