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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Epitaxial self-assembly of block copolymer for multiple patterning = 블록공중합체의 에피탁시얼 자기조립을 이용한 멀티플 패터닝link Park, Seung-Hak; 박승학; Kim, Sang-Ouk; 김상욱, 한국과학기술원, 2009 |
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