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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
ALD-TiN을 이용한 MOCVD Al박막의 표면 거칠기 개선에 관한 연구 = A study on the surface morphology improvement of MOCVD Al film using ALD-TiNlink

이현배; Lee, Hyun-Bae; 강상원; Kang, Sang-Won, 한국과학기술원, 1999

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