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RF 마그네트론 스퍼터링법에 의해 증착된 Ag-doped $Ge_2Sb_2Te_5$ 박막의 미세구조 특성 = Microstructural characterization of Ag-doped $Ge_2Sb_2Te_5$ thin films deposited by RF magnetron sputteringlink

김은태; Kim, Eun-Tae; et al, 한국과학기술원, 2006

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