반도체 제조공정을 위한 새로운 생산일정 알고리즘A New Scheduling Algorithm for Semiconductor Manufacturing Process

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dc.contributor.author복, 진광-
dc.contributor.author이, 승권-
dc.contributor.author문, 성득-
dc.contributor.author박, 선원-
dc.contributor.authorBok, Jin-Kwang-
dc.contributor.authorLee, Seungkwon-
dc.contributor.authorMoon, Sungdeuk-
dc.contributor.authorPark, Sunwon-
dc.date.accessioned2011-09-29T02:00:36Z-
dc.date.available2011-09-29T02:00:36Z-
dc.date.issued1998-12-
dc.identifier.citationJournal of Control, Automation and Systems Engineering, Vol.4, No.6en
dc.identifier.urihttp://hdl.handle.net/10203/25296-
dc.description.abstractA new scheduling algorithm for large scale semiconductor processes is addressed. The difficulties of scheduling for semiconductor fabrication processes are mainly due from repeating production of wagers that experience reentrant flows. Sequence branch algorithm (SBA) is proposed for large real scheduling problems when all processing times are deterministic. The SBA is vased on the reachability graph of Petri net of which the solution deviating a little from the optimal solution of mized integer programming, it is adjustable for large size scheduling provlems. Especially, it shows a potential that is capable of handling commercial size problems that are intractable with mathmatical programming.en
dc.description.sponsorship본 논문은 한국과학재단 지정 우수연구센터인 공정산업의지능 자동화 연구센터에서 지원하여 연구하였습니다.en
dc.language.isokoen
dc.publisher제어자동화시스템공학회en
dc.subjectsemiconductor schedulingen
dc.subjectsequence branch algorithmen
dc.subjectSBAen
dc.title반도체 제조공정을 위한 새로운 생산일정 알고리즘en
dc.title.alternativeA New Scheduling Algorithm for Semiconductor Manufacturing Processen
dc.typeArticleen
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