반도체 제조공정을 위한 새로운 생산일정 알고리즘

Abstract

A new scheduling algorithm for large scale semiconductor processes is addressed. The difficulties of scheduling for semiconductor fabrication processes are mainly due from repeating production of wagers that experience reentrant flows. Sequence branch algorithm (SBA) is proposed for large real scheduling problems when all processing times are deterministic. The SBA is vased on the reachability graph of Petri net of which the solution deviating a little from the optimal solution of mized integer programming, it is adjustable for large size scheduling provlems. Especially, it shows a potential that is capable of handling commercial size problems that are intractable with mathmatical programming.