기상합성 고유전율 하이브리드 절연막

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dc.contributor.author김민주ko
dc.contributor.author박관용ko
dc.contributor.author이태인ko
dc.contributor.author임성갑ko
dc.contributor.author조병진ko
dc.date.accessioned2019-03-19T01:58:16Z-
dc.date.available2019-03-19T01:58:16Z-
dc.date.created2019-03-12-
dc.date.created2019-03-12-
dc.date.issued2019-02-15-
dc.identifier.citation제26회 한국반도체학술대회-
dc.identifier.urihttp://hdl.handle.net/10203/251873-
dc.languageKorean-
dc.publisherDB하이텍, 한국반도체산업협회, 한국반도체연구조합-
dc.title기상합성 고유전율 하이브리드 절연막-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname제26회 한국반도체학술대회-
dc.identifier.conferencecountryKO-
dc.identifier.conferencelocation강원도 웰리힐리파크-
dc.contributor.localauthor임성갑-
dc.contributor.localauthor조병진-
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CBE-Conference Papers(학술회의논문)EE-Conference Papers(학술회의논문)
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