Measurement, Simulation and Mathematical Estimation of Magnetic Field Shielding Effectiveness of Sputtered Shielding Materials using Spiral Coils

Abstract

Recently, semiconductor devices are becoming more diverse and scaled down for various applications such as electronic devices, communication systems and automotive components. Such applications can utilize sputtered shielding structures to solve electromagnetic interference (EMI) issues. To reduce the EMI issues, copper and nickel are commonly used as sputtered shielding materials. To analyze the shielding effectiveness, we applied the Schelkunoff's theory. For the verification of the Schelkunoff's theory, we simulated and measured the shielding effectiveness of copper and nickel at the frequencyrange between 100 kHz and 10 MHz using two identical coils.