Quartz tuning forks with hydrogel patterned by dynamic mask lithography for humidity sensing

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This communication reports a new humidity sensing platform based on a quartz tuning fork (QTF) with hydrogel patterned. A commercial QTF is placed into a polydimethylsiloxane (PDMS) mold to make a flat plane between two prongs and this is called a QTF-PDMS mold assembly. Then, a PDMS cover with 10-mu m deep recess is placed on top of the QTF-PDMS mold assembly. Then, hydrogel prepolymer, polyethyleneglycol-diacrylate (PEG-DA, Mw 575), mixed with a photoinitiator is introduced between the QTF-PDMS mold assembly and the PDMS cover and cured as a specific shape by digital micromirror device (DMD)-based dynamic mask lithography. Each QTF with a patterned PEG-DA structure is characterized and used for humidity sensing experiments. The humidity sensing resolution is also investigated by time-domain frequency measurement and Allan deviation analysis.
Publisher
ELSEVIER SCIENCE SA
Issue Date
2018-11
Language
English
Article Type
Article
Citation

SENSORS AND ACTUATORS B-CHEMICAL, v.273, pp.821 - 825

ISSN
0925-4005
DOI
10.1016/j.snb.2018.06.099
URI
http://hdl.handle.net/10203/248266
Appears in Collection
ME-Journal Papers(저널논문)
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