Polymer insulator patterning for multi-level metal interconnection in organic integrated circuits using iCVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박홍근 | ko |
| dc.contributor.author | Yoo, Hochen | ko |
| dc.contributor.author | 유승현 | ko |
| dc.contributor.author | 김재준 | ko |
| dc.contributor.author | 임성갑 | ko |
| dc.date.accessioned | 2018-12-20T05:28:42Z | - |
| dc.date.available | 2018-12-20T05:28:42Z | - |
| dc.date.created | 2018-12-05 | - |
| dc.date.issued | 2018-10-25 | - |
| dc.identifier.citation | 2018 추계 한국화학공학회 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/247850 | - |
| dc.language | English | - |
| dc.publisher | 한국화학공학회 | - |
| dc.title | Polymer insulator patterning for multi-level metal interconnection in organic integrated circuits using iCVD | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2018 추계 한국화학공학회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 대구 EXCO | - |
| dc.contributor.localauthor | 임성갑 | - |
| dc.contributor.nonIdAuthor | Yoo, Hochen | - |
| dc.contributor.nonIdAuthor | 유승현 | - |
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