Material-independent nanowire-transfer method based on mechanical interlocking for high performance flexible devices

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This paper reports a novel transfer method to fabricate ultralong, fully aligned nanowires, made of diverse materials on a flexible substrate. For the uniform transfer of nanowires made from a wide range of materials, a facile and robust mechanics-based nano-transfer method has been developed. A selectively dry-removable amorphous carbon nano-sacrificial layer between a vacuum-deposited nanowire and the underlying master mold is newly introduced, and it facilitates the robust and reliable mechanical transfer of dense and aligned nanowires onto a flexible substrate. Using the developed method, we first fabricated ultralong and fully aligned metal/metal-oxide (gold, platinum, and copper-oxide) nanowires on a large-area flexible substrate (2.5 × 2 cm
Publisher
Institute of Electrical and Electronics Engineers Inc.
Issue Date
2018-01-22
Language
English
Citation

31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, pp.33 - 36

DOI
10.1109/MEMSYS.2018.8346474
URI
http://hdl.handle.net/10203/247558
Appears in Collection
EE-Conference Papers(학술회의논문)
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