DSpace at KOASAS
College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Journal Papers(저널논문)

A novel checker-patterned AlN MEMS resonator as gravimetric sensor

Cited 15 time in webofscience Cited 0 time in scopus
  • Hit : 135
  • Download : 0
Export
DC FieldValueLanguage
dc.contributor.authorHeidari, Amirko
dc.contributor.authorYoon, Yong-Jinko
dc.contributor.authorLee, Man I.ko
dc.contributor.authorKhine, Lynnko
dc.contributor.authorPark, Mi Kyoungko
dc.contributor.authorTsai, Julius Ming Linko
dc.date.accessioned2018-10-19T00:36:08Z-
dc.date.available2018-10-19T00:36:08Z-
dc.date.created2018-09-10-
dc.date.created2018-09-10-
dc.date.issued2013-01-
dc.identifier.citationSENSORS AND ACTUATORS A-PHYSICAL, v.189, pp.298 - 306-
dc.identifier.issn0924-4247-
dc.identifier.urihttp://hdl.handle.net/10203/245991-
dc.description.abstractThis paper presents the design and experimental verification of a new class of piezoelectric aluminum nitride (AlN) resonator with checker-patterned electrode architecture for mass sensing applications. The mass sensitivity of the developed sensor is analytically derived and confirmed with FEM simulations and experimental results. The results show that a 773 MHz resonator has mass sensitivity of 175.42 mu m(2)/ng and detection limit of 18.7 ng/cm(2). The developed sensor has an obtained mass sensitivity of 2-3 times higher than that of state-of-the-art mass sensors and provides high potential for developed piezoelectric transducers for mass sensing applications. (C) 2012 Elsevier B.V. All rights reserved.-
dc.languageEnglish-
dc.publisherELSEVIER SCIENCE SA-
dc.subjectQUARTZ-CRYSTAL MICROBALANCE-
dc.subjectMASS SENSOR-
dc.subjectPOLYELECTROLYTE MULTILAYERS-
dc.subjectWAVE-
dc.subjectALUMINUM-
dc.subjectBIOSENSORS-
dc.subjectFBAR-
dc.subjectSENSITIVITY-
dc.subjectCANTILEVER-
dc.subjectRESOLUTION-
dc.titleA novel checker-patterned AlN MEMS resonator as gravimetric sensor-
dc.typeArticle-
dc.identifier.wosid000314622600036-
dc.identifier.scopusid2-s2.0-84870536852-
dc.type.rimsART-
dc.citation.volume189-
dc.citation.beginningpage298-
dc.citation.endingpage306-
dc.citation.publicationnameSENSORS AND ACTUATORS A-PHYSICAL-
dc.identifier.doi10.1016/j.sna.2012.09.027-
dc.contributor.localauthorYoon, Yong-Jin-
dc.contributor.nonIdAuthorHeidari, Amir-
dc.contributor.nonIdAuthorLee, Man I.-
dc.contributor.nonIdAuthorKhine, Lynn-
dc.contributor.nonIdAuthorPark, Mi Kyoung-
dc.contributor.nonIdAuthorTsai, Julius Ming Lin-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorAluminium nitride (AlN) resonator-
dc.subject.keywordAuthorContour-mode resonator (CMR)-
dc.subject.keywordAuthorWidth extensional mode resonator (WXR)-
dc.subject.keywordAuthorChecker-mode resonator (CHR)-
dc.subject.keywordAuthorMicroelectromechanical-system (MEMS) resonator-
dc.subject.keywordAuthorPiezoelectric resonator-
dc.subject.keywordAuthorMass sensing-
dc.subject.keywordPlusQUARTZ-CRYSTAL MICROBALANCE-
dc.subject.keywordPlusMASS SENSOR-
dc.subject.keywordPlusPOLYELECTROLYTE MULTILAYERS-
dc.subject.keywordPlusWAVE-
dc.subject.keywordPlusALUMINUM-
dc.subject.keywordPlusBIOSENSORS-
dc.subject.keywordPlusFBAR-
dc.subject.keywordPlusSENSITIVITY-
dc.subject.keywordPlusCANTILEVER-
dc.subject.keywordPlusRESOLUTION-
Appears in Collection
ME-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 15 items in WoS Click to see citing articles in records_button

Display Simple Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0